Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses

ABSTRACT

Methods of cleaning backing plates of electrode assemblies, or electrode assemblies including a backing plate and an electrode plate are provided. The methods can be used to clean backing plates and electrode plates made of various materials, such as silicon electrode plates and graphite and aluminum backing plates. The backing plates and electrode assemblies can be new, used or refurbished. A flushing fixture that can be used in the cleaning methods is also provided, the flushing fixture comprising a base plate comprising a recessed inner portion including and an upper surface configured to support the backing plate or the electrode assembly, and a cover plate configured to cover the base plate, the cover plate including at least one liquid passage through which a flushing liquid is introduced into an interior of the flushing fixture defined by the base plate and cover plate.

This application is a divisional application of U.S. application Ser.No. 11/640,975 entitled “METHODS AND APPARATUS FOR WET CLEANINGELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES”, filed on Dec.19, 2006, and issued as U.S. Pat. No. 7,942,973, which claims priorityunder 35 U.S.C. §119(e) to U.S. Provisional Application No. 60/851,747entitled “METHODS AND APPARATUS FOR WET CLEANING ELECTRODE ASSEMBLIESFOR PLASMA PROCESSING APPARATUSES” filed on Oct. 16, 2006, the entirecontent of each is hereby incorporated by reference.

BACKGROUND

Plasma processing apparatuses are used to process substrates bytechniques including etching, physical vapor deposition (PVD), chemicalvapor deposition (CVD), ion implantation, and resist removal. One typeof plasma processing apparatus used in plasma processing includes areaction chamber containing upper and bottom electrodes. An electricfield is established between the electrodes to excite a process gas intothe plasma state to process substrates in the reaction chamber.

SUMMARY

An exemplary embodiment of a method for cleaning a backing plate of anelectrode assembly for a plasma processing apparatus is provided, whichcomprises contacting the backing plate with a solvent and wiping theouter surface of the backing plate to remove particles from the outersurface; spraying the backing plate with water to remove particles fromouter surface of the backing plate and particles contained in gaspassages of the backing plate; ultrasonically cleaning the backingplate; and flushing the backing plate with a flushing liquid in aflushing fixture that encloses the backing plate to remove particlesfrom the outer surface of the backing plate and particles contained inthe gas passages of the backing plate.

An exemplary embodiment of a method for cleaning an electrode assemblycomprising a backing plate bonded to an electrode plate for a plasmaprocessing assembly is provided, which comprises contacting the backingplate and electrode plate with a solvent and wiping the outer surface ofthe backing plate and the outer surface of the electrode plate to removeparticles from the outer surfaces of the backing plate and electrodeplate; spraying the backing plate and electrode plate with water toremove particles from the outer surfaces of the backing plate andelectrode plate, and particles contained in gas passages of the backingplate and electrode plate; ultrasonically cleaning the electrodeassembly; and flushing the electrode assembly with a flushing liquid ina flushing fixture that encloses the electrode assembly to removeparticles from the outer surfaces of the backing plate and electrodeplate and particles contained in the gas passages of the backing plateand electrode plate.

An exemplary embodiment of a flushing fixture adapted for cleaning abacking plate, or an electrode assembly including the backing plate andan electrode plate, for a plasma processing chamber, comprises a baseplate comprising a recessed inner portion including an upper surface, anouter portion, a lower surface, a plurality of liquid passages extendingbetween the upper surface and the lower surface, the upper surfaceconfigured to support the backing plate or the electrode assembly; and acover plate configured to cover the base plate when the backing plate orelectrode assembly is supported on the upper surface of the base plate,the cover plate including at least one liquid passage through which aflushing liquid is introduced into an interior of the flushing fixturedefined by the base plate and cover plate, the flushing liquid passesthrough gas passages in the backing plate, or through gas passages inthe backing plate and electrode plate of the electrode assembly, andexits the flushing fixture through the liquid passages in the baseplate.

DRAWINGS

FIG. 1 shows an exemplary embodiment of a flushing fixture including acover plate removed from a base plate.

FIG. 2 shows a top perspective view of the base plate of the flushingfixture shown in FIG. 1.

FIG. 3 shows a bottom perspective view of the cover plate of theflushing fixture shown in FIG. 1.

FIG. 4 shows another exemplary embodiment of a flushing fixtureincluding a cover plate secured to a base plate.

FIG. 5 is a cross-sectional view of a portion of the flushing fixtureshown in FIG. 1 in an assembled condition with an electrode assemblyincluding an electrode plate and a backing plate positioned inside ofthe flushing fixture.

FIG. 6 is a cross-sectional view of a portion of the flushing fixtureshown in FIG. 1 in an assembled condition with a backing plate of anelectrode assembly positioned inside of the flushing fixture.

DETAILED DESCRIPTION

Methods of cleaning backing plates and electrode assemblies for plasmaprocessing apparatuses are provided. The backing plates and electrodeassemblies can be new, used or reconditioned. Apparatuses for cleaningthe backing plates and electrode assemblies are also provided.

During the plasma processing of semiconductor substrates, it isdesirable to minimize the number of particles introduced into the plasmaprocessing chamber by chamber components. Such particles, referred to as“adders,” can deposit on the substrates and consequently reduce processyields.

Plasma processing chambers can include an upper electrode assembly and asubstrate support facing the upper electrode assembly and having a lowerelectrode. The upper electrode can be a showerhead electrode assembly,for example. Showerhead electrode assemblies can be a source ofparticles. Such assemblies can include an electrode plate and a backingmember, such as a backing plate, secured to the electrode plate. Theelectrode plate and backing plate can have gas passages through whichprocess gas is introduced into the plasma processing chamber. Thebacking plate can be made of graphite, for example. Graphite isrelatively soft and brittle. The electrode plate can be made of silicon,for example. The electrode plate can be bonded to the backing plate.

The electrode plate and/or the backing plate can be a source ofparticles. The particles can originate from different sources during themanufacturing of the electrode assemblies. For example, the particlescan result from manufacturing of the graphite backing plate, pre-bondingcontamination of the electrode plate and/or backing plate, the bondingprocess, handling and insufficient cleaning, and packaging. Theparticles can be inorganic (e.g., graphite or metals) or organicsubstances.

Control of particulate contamination on the surfaces of semiconductorwafers during the fabrication of integrated circuits is essential inachieving reliable devices and obtaining a high yield. The presence ofparticles on a wafer surface can locally disrupt pattern transfer duringphotolithography and etching steps. As a result, these particles canintroduce defects into critical features, including gate structures,intermetal dielectric layers or metallic interconnect lines, and causethe malfunction or failure of integrated circuit components.

Enhanced cleaning methods are provided that can significantly reduce thenumber of particles on upper electrode assemblies, such as showerheadelectrode assemblies. Embodiments of the methods can be used to cleanonly the backing plate of an electrode assembly. Other embodiments canbe used to clean the electrode assembly including an electrode platesecured to a backing plate.

Embodiments of the methods can be used to clean new, used or refurbishedbacking plates and electrode assemblies. As described herein, “new”backing plates and electrode assemblies have not been used in a plasmaprocessing chamber for processing semiconductor substrates; “used”backing plates and electrode assemblies have been used in a plasmaprocessing chamber for processing semiconductor substrates; and“refurbished” backing plates and electrode assemblies have been used ina plasma processing chamber for processing semiconductor substrates, andthe electrode plate has subsequently been treated, e.g., polished, toremove undesirable surface contamination and/or surface structure, e.g.,black silicon, or uneven surface regions, formed on the bottom(plasma-exposed) surface of the silicon electrode plate during plasmaprocessing. The entire bottom surface of the electrode plate, or only aportion of the bottom surface can be polished, depending on itscondition. Silicon electrode plates may be refurbished one or moretimes.

The electrode plate of the electrode assembly can be composed, forexample, of silicon (preferably single-crystal silicon) or siliconcarbide. The electrode plate is typically circular, and can have adiameter of 200 mm, 300 mm, or even larger, for example. The electrodeplate can have any suitable thickness, such as from about 0.25 in toabout 0.5 in. The backing plate can be composed, for example, ofgraphite or aluminum. The backing plate is typically circular and sizedto correspond with the shape and size of the electrode plate. Theelectrode assembly can include an outer electrode, such as an outerring, surrounding the electrode plate, and an outer backing member, suchas an outer backing ring, surrounding the backing plate.

Exemplary embodiments of the enhanced cleaning methods can include atleast the following four steps. For cleaning the backing plate only ofan electrode assembly, the backing plate is cleaned with a suitablecleaning liquid containing a solvent, such as isopropyl alcohol. Thebacking plate can be immersed in the cleaning liquid. The backing plateis also wiped with a clean room cloth. The solvent can remove organicmaterials from the backing plate resulting from manufacturing and/orprocessing.

After the wiping, the backing plate is then sprayed with water. Thewater used in embodiments of the cleaning methods is preferablyhigh-purity deionized water. The spraying is conducted at a selectedwater pressure and for an effective amount of time. New parts typicallycan be sprayed for a shorter period of time than used or refurbishedparts to achieve the desired cleaning. New, used and refurbished partstypically are sprayed more than once.

After the spraying, the backing plate is ultrasonically cleaned in aliquid bath. The ultrasonic cleaning is conducted at a selected powerlevel, temperature and for an effective amount of time to removeparticles from the backing plate. The liquid is preferably high-purity,deionzed water. This step can be performed more than once. New partstypically can be ultrasonically cleaned for a shorter period of timethan used or refurbished parts to achieve the desired result. Used andrefurbished parts typically are ultrasonically cleaned more than once.

The backing plate is also cleaned in a flushing fixture described ingreater detail below. The flushing fixture utilizes a flushing liquid atan elevated pressure to remove particles from within gas passages of thebacking plate (and/or electrode plate of an electrode assembly).

For an electrode assembly including a backing plate secured to anelectrode plate, the cleaning with a solvent and with deionized water,and the spraying with pressurized deionized water, are preformed on theexposed surfaces of the electrode plate and backing plate.

Additional aspects of the enhanced cleaning methods will be describedwith reference to the cleaning of an exemplary embodiment of anelectrode assembly including a silicon electrode plate and a graphite ormetal (e.g., aluminum) backing plate adhesively bonded to the electrodeplate. As described above, however, embodiments of the cleaning methodscan be used to clean backing plates prior to bonding them to electrodeplates, e.g., graphite backing plates or aluminum backing plates. Forexample, the methods can be used to clean a graphite backing platebefore it is bonded to a silicon electrode, and then to again clean theelectrode assembly after the graphite backing plate has been bonded tothe silicon electrode. The cleaning removes surface particles as well asparticles contained in gas passages of the backing plate and electrodeplate, and particles between the plates. The electrode assembly can benew, used or refurbished.

Initially, the electrode assembly is visually inspected for defects.

The electrode assembly is treated with a solvent, preferably byimmersion in a solvent tank containing isopropyl alcohol or the like.The electrode assembly is treated (e.g., immersed) for a desired amountof time, e.g., about 5 minutes to about 15 minutes. The siliconelectrode plate and graphite plate are both wiped with a clean roomcloth to remove surface contaminants including organics and humancontamination.

Preferably in a Class 10 clean room, the silicon electrode plate issprayed with a spray gun using deionized water at a selected pressure,typically of less than about 50 psi pressure, using N₂ or the like.Typically, the silicon electrode plate is sprayed for at least about 3-5minutes, the graphite plate is sprayed for at least about 2-5 minutes,and the silicon electrode plate is again sprayed for at least about 3-5minutes, for a total of at least about 10 minutes. The spraying iseffective to remove surface particles from the silicon electrode plateand backing plate, and also to remove particles contained inside of thegas passages of these plates.

Preferably in a Class 10 clean room, the silicon electrode plate iswiped with isopropyl alcohol/deionized water until no contamination isvisible on the wipe. The graphite backing plate is also wiped withisopropyl alcohol/deionized water until no contamination is visible onthe wipe Wiping removes surface particles on the plates.

Preferably in a Class 10000 clean room, the electrode assembly isimmersed in an ultrasonic tank containing deionized water at atemperature of about 40-50° C. for about 5 to about 20 minutesUltrasonic cleaning removes particles from the electrode assembly.

Preferably in a Class 10000 clean room, the electrode plate is againsprayed with a spray gun as described above using deionized water at aselected pressure, typically of less than about 50 psi. Typically, thesilicon electrode plate is sprayed for at least about 3-5 minutes, thegraphite plate is sprayed for at least about 2-5 minutes, and thesilicon electrode plate is again sprayed for at least about 3-5 minutes,for a total of at least about 10 minutes. The spraying is effective toremove surface particles from the silicon electrode plate and backingplate, and also to remove particles contained inside of the gas passagesof these plates.

Preferably in a Class 10 clean room, the electrode assembly is installedin a flushing fixture. An exemplary embodiment of the flushing fixture10 constructed to clean an electrode assembly (or a backing plate of anelectrode assembly) is shown in FIGS. 1 to 3. The flushing fixture 10comprises a base plate 20 and a cover plate 50. FIG. 1 depicts theflushing fixture 10 with the cover plate 50 removed. The illustratedbase plate 20 has a circular configuration and comprises an uppersurface 22 and a lower surface 24. The upper surface 22 includes anannular first projection 26 and an annular second projection 28 locatedradially outward from the first projection 26. The upper surface 22includes a central liquid passage 30, a plurality of circularly-spacedliquid passages 32 located between the first projection 26 and thesecond projection 28, and a plurality of circularly-spaced liquidpassages 34 located between the second projection 28 and an outerportion 36 of the base plate 20, which surrounds the inner portion.Diametrically-opposed alignment holes 38 are formed in the outer portion36. In FIG. 1, the electrode assembly including the electrode plate 72and an underlying backing plate 74 (FIG. 5) secured to the electrodeplate 72 is supported on the base plate 20.

In the embodiment, the base plate 20 includes handles 40 provided on theouter portion 36 to allow a user to transport the flushing fixture 10.For example, a user can grasp the handles 40 to position the flushingfixture 10 at the open upper end of a tank used with the flushingfixture 10 for cleaning operations. During use of the flushing fixture10, a flushing liquid, e.g., high-purity, deionized water, is flowedthrough the fluid passages 30, 32, 34 of the base plate 20 and into thetank.

In the embodiment, circularly-spaced latches 42 are provided on theouter portion 36 of the base plate 20. Each of the latches 42 includes afastener 44. As shown in FIG. 2, the latches 42 are preferably recessedso that the latches 42 do not come into contact with an electrodeassembly supported on the base plate 20.

The cover plate 50 of the flushing fixture 10 shown in FIG. 3 isconfigured to cover the base plate 20. The cover plate 50 comprises arecessed inner portion 52 sized to overly the inner portion of the baseplate 20, and an outer portion 54 adapted to overly the outer portion 36of the base plate 20, when the cover plate 50 is installed on the baseplate 20. The cover plate 50 includes alignment pins 56, each of whichis sized to be inserted into a respective alignment hole 38 in the outerportion 36 of the base plate 20 when the cover plate 50 is placed on thebase plate 20. The alignment pins 56 are preferably made of a soft,flexible material, such as polytetrafluorethylene (PTFE), or the like,to avoid damage to the electrode assembly. The cover plate 50 alsocomprises a plurality of cut-outs 57 formed in the outer portion 54,each being configured to receive a fastener 44 of a latch 42 to securethe cover plate 50 to the base plate 20.

The inner portion 52 of the cover plate 50 includes at least one liquidpassage, preferably multiple liquid passages 58, through which aflushing liquid is introduced into the space between the inner portion52 of the cover plate 50 and the inner portion of the base plate 20. Inan embodiment, each of the liquid passage 58 can be connected in fluidcommunication with a separate liquid supply line.

As shown in FIG. 4, the flushing fixture 10 includes an enclosure 60defining a plenum 62 provided on the top surface 59 of the cover plate50. The enclosure 60 includes a single fluid passage 64 for connectionto a liquid supply line to supply a flushing liquid to each of theliquid passages 58.

The outer portion 54 of the cover plate 50 includes a circular groove 66(FIG. 3) and an O-ring 68 inserted in the groove 66 (FIGS. 5 and 6). Asdescribed below, the O-ring 68 provides a water-tight seal between thecover plate 50 and a portion of an electrode assembly that is supportedon the base plate 20 when the cover plate 50 is secured to the baseplate 20.

The base plate 20 and cover plate 50 are made from a suitable materialthat is compatible with the materials of electrode assemblies. In apreferred embodiment, the base plate 20 and cover plate 50 are made of apolymeric material, such as polyetherimide. Regarding the base plate 20,the latches 42 can be made of other suitable materials.

FIG. 5 depicts the flushing fixture 10 with the cover plate 50 securedto the base plate 20. The electrode assembly 70 including the electrodeplate 72 and the backing plate 74 is supported on the base plate 20 andenclosed in the flushing fixture 10. The electrode plate 72 is bonded(e.g., adhesively bonded) to the backing plate 74. As discussed above,the electrode assembly can be new, used or refurbished. The electrodeplate 72 can be composed, e.g., of silicon or SiC. The backing plate 74can be composed, e.g., of graphite or aluminum. The electrode of theelectrode assembly 70 can include an outer electrode, e.g., a continuousor multi-segment ring, configured to surround the electrode ring 72. Thebacking member can also include a ring configured to surround thebacking plate 74. The rings of the electrode and backing member can becleaned without using the flushing fixture 10 because the ringstypically include only a small number of holes or no holes. That is, therings of the electrode and backing member can be cleaned using each ofthe steps of the cleaning methods other than using the flushing fixture.

As shown in FIG. 5, the O-ring 68 provided in the groove 66 in the coverplate 50 contacts a surface 76 of the electrode plate 72 (i.e., asurface that is exposed to plasma when the electrode assembly 70 isinstalled in a plasma processing chamber) at an outer peripheral portion78 of the electrode plate 72 and forms a liquid-tight seal between theelectrode plate 72 and the outer portion 54 of the cover plate 50. Theelectrode plate 72 includes gas passages 80 in fluid communication withlarger gas passages 82 in the backing plate 74.

To clean the electrode assembly 70, the flushing liquid is introduced athigh pressure into the flushing fixture 10 through the liquid passages58 in the cover plate 50 and flows through the gas passages 80 in theelectrode plate 72 and then through the gas passages 82 in theunderlying backing plate 74. Typically, the flushing liquid is deionizedwater. The flushing liquid can contain a solvent, such as isopropylalcohol. The flushing liquid is typically introduced at a pressure ofabout 40-50 psi and a flow rate of about 5-10 gallons/min. The flushingliquid can be at ambient temperature or at an elevated temperature, suchas about 40-50° C. The flushing fluid preferably is not recirculated.Preferably, particle filters (e.g., 0.2 and 1 μm) are provided along theliquid lines to remove particles from the flushing liquid.

Particles contained in the gas passages 80 of the electrode plate 72and/or backing plate 74, and particles trapped between the electrodeplate 72 and backing plate 74 during handling and bonding, are entrainedin the flushing liquid and removed from the gas passages 80, 82 and frombetween the electrode plate 72 and backing plate 74. The flushing liquidthen flows out of the flushing fixture 10 via the liquid passages 30,32, 34 in the inner portion of the base plate 20. As shown, theelectrode assembly 70 is placed on the base plate 20 with the electrodeplate 72 facing the cover plate 50 to allow particles removed from thegas passages 80 of the electrode plate 72 to pass through the larger gaspassages 82 of the base plate 20. If the electrode assembly 70 isinstead placed on the base plate 20 with the backing plate 74 facing thecover plate 50, large particles removed from the gas passages 82 of thebacking plate 74 can be trapped in the smaller gas passages 80 of theelectrode plate 72 and, consequently, may not be removed from theelectrode plate 72.

FIG. 6 depicts another embodiment of the flushing fixture 10 with thecover plate 50 secured to the base plate 20 and only the backing plate74 of the electrode assembly 70 supported on the base plate 20. In thisembodiment, an adapter ring 84 is provided to overly a surface of thebacking plate 74 and protect the surface. The adapter ring 84 includes agroove 88 sized to receive a raised peripheral edge 90 of the outerperipheral portion 86 of the backing plate 74 to protect the peripheraledge 90 from damage. The O-ring 68 provided on the cover plate 50contacts the surface of the adapter ring 84 and forms a liquid-tightseal between the cover plate 50 and the adapter ring 84.

To clean the backing plate 74 shown in FIG. 6, the flushing liquid isintroduced under pressure into the flushing fixture 10 through theliquid passages 58 in the cover plate 50 and flowed through the gaspassages 82 in the backing plate. Particles contained in the gaspassages 82 of the backing plate 74 are entrained in the flushingliquid.

The backing plate or electrode assembly can be cleaned once or severaltimes in the flushing fixture 10 depending on the condition of thebacking plate or electrode assembly. For example, the backing plate orelectrode assembly can cleaned using isopropyl alcohol flushing (e.g.,2% isopropyl flushing), hot deionized water flushing, and finaldeionized water flushing.

After the electrode assembly is cleaned in the flushing fixture, thesilicon electrode plate is wiped with isopropyl alcohol/deionized wateruntil no contamination is visible on the wipe. The graphite backingplate is wiped with isopropyl alcohol/deionized water until nocontamination is visible on the wipe. The silicon electrode plate can bewiped again with isopropyl alcohol/deionized water until nocontamination is visible on the wipe. The wiping removes particles fromthe surfaces of the electrode plate and backing plate.

Preferably in a Class 10 clean room, the electrode assembly is againimmersed in an ultrasonic tank containing deionized water at atemperature of about 40-50° C. for about 5 to about 20 minutes to removeparticles.

Preferably in a Class 10 clean room, the surface of the siliconelectrode plate is cleaned with a mixed acid by wiping to remove surfacecontamination on the silicon electrode to reduce the number of surfaceparticles. A suitable mixed acid for silicon electrodes contains amixture of HF/HNO₃/HAc. The acid wiping can be performed for about 2-5minutes, for example. The acid wiping removes metal contamination fromthe silicon surface. The silicon electrode plate is rinsed withdeionized water between acid wiping.

After the acid wiping, there is preferably no direct human contact ofthe surface of the silicon electrode plate, and all contact is withgloves or equipment.

Preferably in a Class 10 clean room, the electrode assembly is againsprayed with a spray gun using deionized water at a selected pressure,typically of less than about 50 psi. The silicon electrode plate istypically sprayed for at least about 3-5 minutes, the graphite backingplate is sprayed for at least about 2-5 minutes, and the siliconelectrode plate is again sprayed for at least about 3-5 minutes, for atotal of at least about 10 minutes. The spraying is effective to removesurface particles from the silicon electrode plate and the graphitebacking plate, and also to remove particles contained inside of the gaspassages of these plates.

Preferably in a Class 10 clean room, the silicon electrode plate isdried with nitrogen.

Next, preferably in a Class 10 clean room, the electrode assembly isheated at a temperature of about 110-120° C. for a period of about 3-5hours to completely remove water from the electrode assembly.

Preferably in a Class 10 clean room, the electrode assembly is visuallyinspected for physical defects and cosmetic defects.

The electrode assembly is then subjected to surface particle countanalysis.

The electrode assembly is then packaged. Preferably in a Class 10 cleanroom, the electrode assembly is placed into a nylon inner bag.Preferably in a Class 1000 clean room, the inner bag is sealed. Theinner bag is placed inside of an outer bag, which is vacuum sealed.

EXAMPLES Example 1

The number of particles on an as-received graphite backing plate thathad not been subjected to ultrasonic cleaning was measured using aliquid particle counter. The graphite backing plate was thenultrasonically cleaned in a tank for 1 hr, 2 hr and 3 hr in deionizedwater at a temperature of about 50° C., an ultrasonic frequency of 40kHz and a power density after graphite loading of 10-20 W/in². That is,the graphite plate was ultrasonically cleaned for 1 hr, then removedfrom the liquid bath and tested, then subjected to ultrasonic cleaningfor 1 additional hour, then removed from the liquid bath again andtested, then subjected to ultrasonic cleaning for 1 additional hour (fora total of 3 hr), then removed from the liquid bath again and tested.The number of particles on the backing plate was then measured for eachcleaning time period using the liquid particle counter, which analyzesthe liquid in which the graphite backing plate is cleaned. Themeasurement results are shown in Table 1.

TABLE 1 Concentration of Particles/cm² Post 1 hr Post 2 hr Post 3 hrUltrasonic Ultrasonic Ultrasonic Particle Size As-Received CleaningCleaning Cleaning ≧0.2 μm 330,000,000 17,000,000 9,700,000 6,900,000≧0.3 μm 150,000,000 7,300,000 3,700,000 2,600,000 ≧0.5 μm 25,000,0001,200,000 4,900,000 340,000 ≧1.0 μm 1,700,000 90,000 38,000 27,000 ≧2.0μm 77,000 2,300 2,700 2,400

As shown in Table 1, the ultrasonic cleaning significantly reduced thenumber of particles for each size category on the graphite backingplate. However, the number of particles of a size of at least 0.2 μm wasstill 6,900,000 after the 3 hr ultrasonic cleaning.

Example 2

The number of particles on an as-received graphite backing plate thathad been subjected to ultrasonic cleaning was measured using a liquidparticle counter. The graphite backing plate was then ultrasonicallycleaned as described in Example 1. The number of particles on thebacking plate was then measured for each cleaning time period using theliquid particle counter. The measurement results are shown in Table 2.

TABLE 2 Concentration of Particles/cm² As-Received Post 1 hr Post 2 hrPost 3 hr (with ultrasonic Ultrasonic Ultrasonic Ultrasonic ParticleSize cleaning) Cleaning Cleaning Cleaning ≧0.2 μm 23,000,000 12,000,0003,700,000 2,100,000 ≧0.3 μm 11,000,000 4,400,000 1,500,000 780,000 ≧0.5μm 1,700,000 510,000 220,000 91,000 ≧1.0 μm 100,000 37,000 16,000 6,700≧2.0 μm 2,800 2,400 500 630

As shown in Table 2, the ultrasonic cleaning reduced the number ofparticles for each size category on the as-received graphite backingplate. The post 1 hr, 2 hr and 3 hr ultrasonic cleaning of the graphitebacking plate further reduced the number of particles. However, thenumber of particles of a size of at least 0.2 μm was still 2,100,000after the 3 hr ultrasonic cleaning.

Example 3

The number of particles on the surface of an as-received graphitebacking plate that had not been subjected to ultrasonic cleaning wasmeasured using a surface particle counter. Particle count measurementsoutside of a clean room for particles of a size of at least 0.3 μm wereas follows: 12,468 counts/in², 13,646 counts/in² and 9,298 counts/in²,for an average value of 11,804 counts/in².

Example 4

The number of particles on the surface of an as-received graphitebacking plate that had been subjected to ultrasonic cleaning wasmeasured using a surface particle counter. Particle count measurementsoutside of a clean room for particles of a size of at least 0.3 μm wereas follows: 4,794 counts/in², 4,213 counts/in² and 4,274 counts/in², foran average value of 4,427 counts/in².

Example 5

In this example, the as-received graphite backing plate of Example 3that had not been subjected to ultrasonic cleaning was cleaned accordingto an exemplary embodiment of the enhanced cleaning methods. Thegraphite cleaning method included the following procedures. The graphitebacking plate was inspected and surface particles counts were taken forthe graphite backing plate using a laser particle counter at multiplelocations outside of a clean room. The graphite backing plate wasimmersed in isopropyl alcohol for 1 minute and wiped to remove heavyblack particles. In a class 1000 clean room, each side of the graphitebacking plate was sprayed with deionized water at a pressure of 40-50psi for 5 minutes. The graphite backing plate was then wiped withhigh-purity deionized water and isopropyl alcohol until no black stainswere visible on the wipes. Next, each side of the graphite backing platewas again sprayed with deionized water at a pressure of 40-50 psi for 1minute. The graphite backing plate was then inserted into a flushingfixture as depicted in FIGS. 1 and 6 (the adapter ring 84 was not usedwith the graphite backing plate). Nitrogen and high-purity deionizedwater were flushed at a pressure of 40-50 psi for 15 minutes. Next, thegraphite backing plate was immersed in an ultrasonic cleaning tank at aliquid temperature of 40-50° C. at an ultrasonic power of 10-20 W/in²for about 8 minutes on each surface. The surfaces of the graphitebacking plate were then wiped with isopropyl alcohol and high-puritydeionized water until no black stains were visible on the wipes. Eachside of the graphite backing plate was again sprayed with deionizedwater at a pressure of 40-50 psi for 1 minute. The graphite backingplate was then dried with nitrogen. Next, the graphite backing plate washeated in an oven at a temperature of 120° C. for 3 hours. The graphitebacking plate was removed from the oven and allowed to cool down toambient temperature. Five surface particle counts were taken using alaser particle counter at multiple locations outside of a clean room.Each particle count reading was 0.0 counts/in² for particles of a sizeof at least 0.3 μm.

Example 6

In this example, an as-received graphite backing plate of Example 4 thathad been subjected to ultrasonic cleaning was cleaned according to anexemplary embodiment of the cleaning method described in Example 5.Following the cleaning, five surface particle counts were taken using alaser particle counter at multiple locations outside of a clean room.Each particle count reading was 0.0 counts/in² for particles of a sizeof at least 0.3 μm.

Example 7

The graphite backing plate of Example 5 was analyzed using a liquidparticle counter. The test results are shown in Table 3.

TABLE 3 Concentration of Particles/cm² As-Received (without Post 1 hrPost 2 hr Post 3 hr ultrasonic Ultrasonic Ultrasonic Ultrasonic ParticleSize cleaning) Cleaning Cleaning Cleaning ≧0.2 μm 2,700,000 1,900,0001,300,000 420,000 ≧0.3 μm 1,100,000 780,000 480,000 170,000 ≧0.5 μm190,000 120,000 72,000 24,000 ≧1.0 μm 19,000 12,000 8,200 2,200 ≧2.0 μm1,100 440 480 <100

As shown in Table 3, the embodiment of the enhanced cleaning methodreduced the number of particles of a size of at least 0.2 μm to lowvalues for the initial liquid particle counter values and after 3 hoursof ultrasonic cleaning.

Example 8

The graphite backing plate of Example 6 was analyzed using a liquidparticle counter. The test results are shown in Table 4.

TABLE 4 Concentration of Particles/cm² As-Received Post 1 hr Post 2 hrPost 3 hr (with ultrasonic Ultrasonic Ultrasonic Ultrasonic ParticleSize cleaning) Cleaning Cleaning Cleaning ≧0.2 μm 1,000,000 740,000590,000 410,000 ≧0.3 μm 420,000 280,000 250,000 160,000 ≧0.5 μm 60,00035,000 33,000 17,000 ≧1.0 μm 4,100 2,800 2,500 1,300 ≧2.0 μm 430 190<100 <100

As shown in Table 4, the embodiment of the enhanced cleaning methodreduced the number of particles of a size of at least 0.2 μm to lowervalues than shown in Table 3.

The liquid particle count results for particles of a size of at least0.2 μm for Examples 1, 2, 7 and 8 are summarized in Table 5.

TABLE 5 Concentration of Particles ≧0.2 μm/cm² Post 1 hr Post 2 hr Post3 hr Ultrasonic Ultrasonic Ultrasonic Example As-Received CleaningCleaning Cleaning 1 - without 330,000,000 17,000,000 9,700,000 6,900,000ultrasonic cleaning 2 - with 23,000,000 12,000,000 3,700,000 2,100,000ultrasonic cleaning 7 - without 2,700,000 1,900,000 1,300,000 420,000ultrasonic cleaning, with enhanced cleaning 8 - with 1,000,000 740,000590,000 410,000 ultrasonic cleaning + enhanced cleaning

Backing plates (e.g., graphite backing plates) and electrode assemblies(e.g., including a graphite backing plate and a silicon electrodesecured to the backing plate) cleaned by embodiments of the cleaningmethods described herein can be installed in plasma processing chambersand used in plasma processing of semiconductor substrates tosignificantly reduce the number of particle adders, preferably to onsuch substrates as compared to backing plates or electrode assembliesthat have not be subjected to the cleaning. Embodiments of the cleaningmethods can achieve consistently low chamber particle counts andsubstantially no killer defects. For example, embodiments of thecleaning methods can achieve particle adder counts of less than 20, suchas less than 10, or less than 5, for particle adders sized from about0.2 μm to about 1 μm, area adders counts of particles sized larger thanabout 0.2 μm of substantially zero.

Although the present invention has been described in connection withpreferred embodiments thereof, it will be appreciated by those skilledin the art that additions, deletions, modifications, and substitutionsnot specifically described may be made without departing from the spiritand scope of the invention as defined in the appended claims.

1. A flushing fixture adapted for cleaning a backing plate, or ashowerhead electrode assembly including the backing plate and anelectrode plate, for a plasma processing chamber, the flushing fixturecomprising: a base plate comprising a recessed inner portion includingan upper surface, an outer portion, a lower surface, a plurality ofliquid passages extending between the upper surface and the lowersurface, the upper surface configured to support the backing plate orthe showerhead electrode assembly; and a cover plate configured to coverthe base plate and enclose the backing plate or showerhead electrodeassembly when the backing plate or showerhead electrode assembly issupported on the upper surface of the base plate, the cover plateincluding at least one liquid passage through which a flushing liquid isintroduced into an interior of the flushing fixture defined by the baseplate and cover plate, the flushing liquid passes through gas passagesin the backing plate, or through gas passages in the backing plate andelectrode plate of the showerhead electrode assembly, and exits theflushing fixture through the liquid passages in the base plate.
 2. Theflushing fixture of claim 1, wherein the base plate comprises aplurality of circumferentially spaced alignment holes provided in theouter portion, and the cover plate includes a plurality of alignmentpins each of which is sized to be received in an alignment hole of thebase plate when the cover plate is positioned to cover the base plate.3. The flushing fixture of claim 1, further comprising: (a) an adapterring configured to be positioned between the cover plate and base plateand to contact the cover plate and a surface of the backing plate toprevent the surface of the backing plate from contacting the cover plateand/or (b) an O-ring adapted to provide a liquid seal between the coverplate and the backing plate or the showerhead electrode assembly whensupported on the upper surface of the base plate.
 4. The flushingfixture of claim 2, wherein the alignment pins are comprised ofpolytetrafluorethylene.
 5. The flushing fixture of claim 1, wherein thecover plate is circular and comprises a plurality of cut-outs formed inan outer portion thereof, each of the cut-outs configured to receive afastener of a latch supported on the base plate to secure the coverplate to the base plate.
 6. The flushing fixture of claim 1, wherein anouter portion of the cover plate includes a groove and an O-ring in thegroove which provides a liquid seal between the cover plate and thebacking plate.
 7. The flushing fixture of claim 1, wherein the baseplate and the cover plate are circular and made of a polymeric material.8. The flushing fixture of claim 7, wherein the polymeric material ispolyetherimide.
 9. The flushing fixture of claim 1, wherein the uppersurface of the base plate comprises a first annular projection, a secondannular projection located radially outward from the first annularprojection, and a plurality of circularly-spaced liquid passages locatedbetween the first annular projection and the second annular projection.10. The flushing fixture of claim 9, wherein the upper surface of thebase plate further comprises a plurality of circularly-spaced liquidpassages located between the second annular projection and the outerportion of the base plate.
 11. The flushing fixture of claim 1, whereinthe outer portion of the base plate comprises a plurality ofcircularly-spaced latches.
 12. The flushing fixture of claim 11, whereinthe latches are recessed and include a fastener.
 13. The flushingfixture of claim 1, wherein the cover plate comprises a recessed innerportion adapted to overlie the inner portion of the base plate and anouter portion adapted to overlie the outer portion of the base plate.14. The flushing fixture of claim 13, wherein the inner portion of thecover plate comprises at least one liquid passage through which aflushing liquid is introduced.
 15. The flushing fixture of claim 1,wherein the flushing fixture comprises an enclosure on a top surface ofthe cover plate, the enclosure including a single fluid passage adaptedto supply flushing liquid to liquid passages in the top surface of thecover plate defining a plenum provided on a top surface of the coverplate.
 16. The flushing fixture of claim 15, wherein the enclosurecomprises a fluid passage for connection to a liquid supply line. 17.The flushing fixture of claim 1, wherein the base plate includes handlesprovided on the outer portion.
 18. The flushing fixture of claim 1,wherein an adapter ring is adapted to overly the backing plate, and anO-ring on the cover plate contacts the adapter ring.